Electrostatic Chuck (ESC or e-chuck) Surface Refinishing by Valley Design

Electrostatic Chuck refinishing to flat, concave or convex, lapped or polished surface finishes

Valley Design, with over 40 years in business and over 20 years experience in processing electrostatic chucks (ESC or e-chucks), can refinish your chuck to specifications from flat, concave or convex shapes, and chucks may be lapped or polished depending on your requirements.

These electrostatic chucks, which are typically in SEMI standard sizes from 100mm, 125mm, 150mm, 200mm, 300mm and 450mm diameter, may have a dielectric layer from various materials such as polyimide, Alumina (Al203), Sapphire, Silicon Carbide, Epoxy, Silicon Nitride, SiSiC, Glass, thermal spray, and others. Valley has the capability to re-shape these ESC or e-chucks into your desired flatness, whether it be flat, concave or convex. For example, flat to 1/4 micron, or concave to 1/4 micron, or 1/2 micron to concave 2 microns, and the same for convex chucks. Depending on your application, Valley can remove as little as 1/4 micron of stock. Removing minimal stock can remove defects, or flatten or changing the shape to convex or convave, or we can remove any additional amount of material. Based on our many years of experience, Valley can also lap or polish all these various materials which make up the dielectric layer. In addition to refinishing used chucks, we can also re-shape new electrostatic chucks to various flatnesses, or concave or convex as needed.

These electrostatic (ESC) chucks may have grooves, bumps, or other surface features and designs. Applications include:

• Bonding technology
• Lithography
• Inspection
• Metrology
• Display Manufacturing
• Wafer Handling
• Dry Etching
• Metal Deposition
• Etching Processes
• Ion Implanting

Contact Valley Design for all your electrostatic chuck finishing needs.