Vacuum chucks repaired for wafer dicing and lithography
Vacuum and Wafer Chuck Repair Service
Vacuum chucks can be repaired if damaged and reconditioned when worn or do not meet user's needs for flatness, parallelism or level of surface defects. With prior arrangement, 24 hour service is possible.
Vacuum chuck repair service is now available from Valley Design Corp. We can accommodate chucks from 1" to 48" made from porous material. Silicon Carbide, Ceramic, hard-coated Aluminum, Stainless Steel or any other material.
Vacuum chucks, for lithographic applications are manufactured to extreme limits of flatness, parallelism, thickness tolerance, and surface finish. The surface condition of chucks is extremely important for wafer reference throughout the critical processing and alignment in various fabrication processes. In dicing operation, chucks are easily damaged. Harsh environment, continuous use, accidents - all contributed to dicing chuck damage.
Most vacuum chucks can be restored to the original or even tighter tolerance condition. Depending on size, flatness is possible to ¼ wave, parallelism to 50 millionths of an inch, thickness tolerance usually to 0.001" or tighter and surfaces polished to mirror finish when required. Pricing, depending on quantity, specifications and size, usually starts in the $500 range.
When equipment is down because of a faulty chuck, Valley design will help keep downtime to a minimum. Check us out.
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