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Planarizing and Polishing Spin Coated Polyimide
Spin-on Polyimide Surfaces Without Defects
Spin coated polyimide may be planarized and polished to give a defect free surface for improved lithography processing.
Polyimide coatings applications:
- Multilayer and thin film uses
- Protective overcoat for semiconductor chips
- Flip chip bonding applications
- Interlayer dielectrics
- Structural layers in micromachining
- Lithographic processes
There are many benefits from using planarized polyimide coatings. By planarizing polyimide coatings, applied as liquid onto a substrate by:
- Spin coating
- Spraying
- Extrusion
- Dip coating,
The surface will be polished to a near defect free level for better functioning as a dielectric and will provide improved yield in polyimide patterning applications.
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