Ultra-Thin Wafer Glass and Semi Standard Wafers

Ultra-thin wafer glass consists of very thin, circular slices of precision glass, often made from quartz, borosilicate glass, or fused silica. It is used as a substrate for bonding other materials like silicon in semiconductor manufacturing, especially in Micro Electro-Mechanical Systems (MEMS), because it provides a stable and reliable platform for bonding fragile materials. It also offers excellent thermal and chemical stability.

SEMI standard wafers meet specific diameter, flatness, and thickness standards set by Semiconductor Equipment and Materials International. Typical diameters include 2-inch, 3-inch, 4-inch, 6-inch, 8-inch, and 12-inch. Other standard specifications cover thickness, primary flat length, and the location of the notch or secondary flat. These standards facilitate efficient and consistent production of semiconductor devices.

Valley Design Corporation offers a wide selection of wafer glass and substrates, including Fused Silica, Fused Quartz, Soda Lime Glass, AF45, BK7, B270, Borofloat 33, D263, Gorilla Glass, Eagle XG Glass, Borosilicate Glass, and other materials like 99.6% and 96% Alumina, Sapphire, and Aluminum Nitride. These are available according to SEMI specifications in sizes from 50mm (2″) up to 450mm (17.7″). The SEMI standard wafers can also be fabricated with a SEMI notch or one or two SEMI flats.

The surfaces of these wafer glass and glass substrates can be lapped to become opaque or, if made from sheet glass, are usually transparent on one or both sides with chamfered edges. Wafers may also be optically polished. In addition to SEMI standard sizes, Valley also manufactures custom wafers in any size and thickness with tight tolerances (+/- 0.5 um), including “ultra-thin” – 0.001″ (25 microns) thick. Edges can be optically polished or rounded. Wafer cassette packaging is available.

Typical Glass Substrate and Wafer Glass Applications:

• Cover glass
• Dummy wafers
• Electroluminescent displays
• LCD
• MEMS and SOI
• Mirror coating substrates
• Monitor wafers
• Optical windows
• Optical coating substrates
• Solar cells
• Thin film glass substrates
• Touch control panels

Available in the following materials:

• 1737F
• 96% Alumina
• 99.6% Alumina
• AF45
• Aluminum Nitride
• B270
• BK7
• Borosilicate Glass
• D263
• Fused Silica
• LASFN9
• Quartz
• Sapphire
• Soda Lime Glass
• Other materials are available upon request.

Standard sizes available:

The standard surface finish of sheet glass is 60/40 scratch/dig and it is transparent. Any glass can be further polished to achieve a higher quality surface finish and flatness or can be lapped to make it opaque.

NOTE: All sizes are available with tighter tolerances, better surface finishes and flatness, and in any custom geometry or thickness.

For customized solutions that address your complex technological needs, partner with a company known for its innovation in developing manufacturing processes and techniques that have become industry standards for MEMS and other applications. Contact us online or call us at 978-425-3030. Let’s create something extraordinary together!

Other informative Web pages:

• Properties of Optical Glasses
• MEMS and bonded SOI ultra-thin Silicon wafers
• Polished Fused Silica substrates and wafers