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Chemical Analysis of Typical Aluminum Nitride Substrates
Most common AlN substrates have thermal conductivity of 175 W/mk and coefficient of thermal expansion of 4.6x10-6 (20-400°C).
AlN Substrate Typical Chemical Analysis
| Element |
Concentration |
| Fe |
12 ppm |
| Cu |
27 ppm |
| Ni |
0 ppm |
| Zn |
9 ppm |
| Cr |
3 ppm |
| Na |
22 ppm |
| K |
12 ppm |
| Y |
2.0 (wt%) |
| Mg |
5 ppm |
| Ca |
43 ppm |
| Ti |
7 ppm |
| V |
43 ppm |
| Zr |
24 ppm |
| Si |
152 ppm |
How Aluminum Nitride substrates are manufactured.
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