C-plane (0001) orientation: | ±0.25 degrees | Special ±0.1 degrees |
Primary flat A-axis: | ±0.5 degrees | Special ±0.3 degrees |
Secondary flat (if required): | 90 degrees CCW to Primary | |
Front surface: | EPI polished (less than 5 Angstroms) | |
Back surface: | Fine grind or polished |
Diameter | 2 in. (50.8 mm) |
2 in. (50.8 mm) |
3 in. (76.2 mm) |
---|---|---|---|
Dia. tol. | ±0.010 in. | ±0.010 in. | ±0.010 in. |
Thickness | 0.330 mm | 0.430 mm | 0.430 mm |
Thk. tol. | ±0.025 mm | ±0.025 mm | ±0.025 mm |
Flatness | 0.025 mm | 0.025 mm | 0.025 mm |
Bow | 0.025 mm | 0.025 mm | 0.025 mm |
Taper-TTV | 0.025 mm | 0.025 mm | 0.025 mm |
Primary Flat | 16 mm | 16 mm | 22 mm |
Flat tol | ±1 mm | ±1 mm | ±1 mm |