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C-Plane Sapphire Windows, Plates and Substrates
C-plane (0001-orientation) sapphire polished substrates are used for growth of GaN and other III-V and II-VI compounds when manufacturing LED's. Other applications include infrared detectors, mercury cadmium telluride, wafer carriers and general optics.
Typical specifications for EPI polished wafers for GaN deposited LED’s and other applications
| C-plane (0001) orientation: |
±0.25 degrees |
Special ±0.1 degrees |
| Primary flat A-axis: |
±0.5 degrees |
Special ±0.3 degrees |
| Secondary flat (if required): |
90 degrees CCW to Primary |
| Front surface: |
EPI polished (less than 5 Angstroms) |
| Back surface: |
Fine grind or polished |
| Diameter |
2 in.
(50.8 mm) |
2 in.
(50.8 mm) |
3 in.
(76.2 mm) |
| Dia. tol. |
±0.010 in. |
±0.010 in. |
±0.010 in. |
| Thickness |
0.330 mm |
0.430 mm |
0.430 mm |
| Thk. tol. |
±0.025 mm |
±0.025 mm |
±0.025 mm |
| Flatness |
0.025 mm |
0.025 mm |
0.025 mm |
| Bow |
0.025 mm |
0.025 mm |
0.025 mm |
| Taper-TTV |
0.025 mm |
0.025 mm |
0.025 mm |
| Primary Flat |
16 mm |
16 mm |
22 mm |
| Flat tol |
±1 mm |
±1 mm |
±1 mm |